Patent Assignment
Reel/Frame 022155/0532
Assignment of Assignor's Interest
Recorded: 2009-01-26
Pages: 3
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Collector for an Illumination System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.