Patent Assignment
Reel/Frame 022156/0053
Assignment of Assignor's Interest
Recorded: 2009-01-26
Pages: 4
Assignors
CLAUSS, WILFRIED
Executed: 2009-01-13
TOTZECK, MICHAEL
Executed: 2009-01-14
MUELLER-RISSMANN, WERNER
Executed: 2009-01-20
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Transmitting Optical Element and Objective for a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.