Patent Assignment
Reel/Frame 022156/0071
Assignment of Assignor's Interest
Recorded: 2009-01-26
Pages: 3
Assignor
NAKAGAWA, YUSUKE
Executed: 2009-01-08
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Seal Mechanism, Seal Trench, Seal Member, and Substrate Processing Apparatus