Patent Assignment
Reel/Frame 022161/0818
Assignment of Assignor's Interest
Recorded: 2009-01-27
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method Using Valve Metal and Nitride of Valve Metal