Patent Assignment
Reel/Frame 022165/0575
Assignment of Assignor's Interest
Recorded: 2009-01-27
Pages: 2
Assignee
INTEVAC, INC.
3560 BASSETT STREET, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
System and Method for Dual-Sided Sputter Etch of Substrates