Patent Assignment
Reel/Frame 022167/0681
Assignment of Assignor's Interest
Recorded: 2009-01-28
Pages: 2
Assignee
CANON ANELVA CORPORATION
2-5-1 KURIGI, ASAO-KU, KAWASAKI-SHI, 215-8550, JAPAN
Covered Property
(1)
Substrate Processing Using the Vapor Supplying Apparatus
Application:
12/342,293 →
Publication:
US 2009/0169923
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.