Patent Assignment
Reel/Frame 022185/0089
Assignment of Assignor's Interest
Recorded: 2009-01-31
Pages: 3
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Methods and Apparatus for Dispensing Semiconductor Processing Solutions with Multi-Syringe Fluid Delivery Systems