Patent Assignment
Reel/Frame 022193/0772
Assignment of Assignor's Interest
Recorded: 2009-02-03
Pages: 4
Assignors
KOSHIMIZU, CHISHIO
Executed: 2009-01-14
HIRANO, TAICHI
Executed: 2009-01-15
HONDA, MASANOBU
Executed: 2009-01-15
HIMORI, SHINJI
Executed: 2009-01-14
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus