Patent Assignment
Reel/Frame 022196/0087
Assignment of Assignor's Interest
Recorded: 2009-01-22
Pages: 4
Assignor
TAMURA, KAZUNARI
Executed: 2009-01-14
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA, 211-8668, JAPAN
Covered Property
(1)
Plasma processing apparatus
Application:
12/320,262 →
Publication:
US 2009/0194023
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.