Patent Assignment
Reel/Frame 022199/0679
Assignment of Assignor's Interest
Recorded: 2009-02-03
Pages: 2
Assignors
NAKASHIMA, SEIYO
Executed: 2009-01-21
YAMADA, TOMOYUKI
Executed: 2009-01-21
SHIMADA, MASAKAZU
Executed: 2009-01-21
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, and Process Tube
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.