Patent Assignment
Reel/Frame 022207/0640
Assignment of Assignor's Interest
Recorded: 2009-02-04
Pages: 3
Assignor
TAKENAKA, TSUTOMU
Executed: 2009-01-05
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Exposure Apparatus and Method of Manufacturing Device