Patent Assignment
Reel/Frame 022223/0571
Assignment of Assignor's Interest
Recorded: 2009-02-09
Pages: 3
Assignor
VAN HAREN, RICHARD JOHANNES FRANCISCUS
Executed: 2009-01-28
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method of Creating an Alignment Mark on a Substrate and Substrate