Patent Assignment
Reel/Frame 022225/0759
Assignment of Assignor's Interest
Recorded: 2009-02-09
Pages: 2
Assignor
HAUTALA, JOHN J.
Executed: 2009-02-05
Assignee
TEL EPION INC.
37 MANNING ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Method for Forming Trench Isolation Using a Gas Cluster Ion Beam Growth Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.