Patent Assignment
Reel/Frame 022238/0802
Assignment of Assignor's Interest
Recorded: 2009-02-11
Pages: 3
Assignor
TANAKA, KOICHIRO
Executed: 2009-02-06
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device