Patent Assignment
Reel/Frame 022242/0167
Assignment of Assignor's Interest
Recorded: 2009-02-11
Pages: 3
Assignor
STRAAIJER, ALEXANDER
Executed: 2009-02-02
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell, and Device Manufacturing Method to Measure a Property of a Substrate