Patent Assignment
Reel/Frame 022249/0913
Assignment of Assignor's Interest
Recorded: 2009-02-12
Pages: 5
Assignors
STANKE, FRED
Executed: 2009-02-09
NORTON, ADAM
Executed: 2009-02-05
TUITJE, HOLGER
Executed: 2009-02-06
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Calibration Method for Optical Metrology