Patent Assignment
Reel/Frame 022256/0300
Assignment of Assignor's Interest
Recorded: 2009-02-13
Pages: 2
Assignors
NODA, TAKAAKI
Executed: 2008-11-28
MIYAMOTO, MASAMI
Executed: 2008-12-02
YAMAMOTO, RYUJI
Executed: 2008-12-03
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.