Patent Assignment
Reel/Frame 022268/0691
Assignment of Assignor's Interest
Recorded: 2009-02-17
Pages: 4
Assignors
HARADA, YUJI
Executed: 2009-01-05
HATAKEYAMA, JUN
Executed: 2009-01-05
MAEDA, KAZUNORI
Executed: 2009-01-05
KOBAYASHI, TOMOHIRO
Executed: 2009-01-05
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition, Resist Protective Coating Composition, and Patterning Process