Patent Assignment
Reel/Frame 022289/0574
Assignment of Assignor's Interest
Recorded: 2009-02-19
Pages: 4
Assignee
ASM AMERICA, INC.
3440 EAST UNIVERSITY DRIVE, PHOENIX, ARIZONA, 85034
Covered Property
(1)
Method and Apparatus for Minimizing Contamination in Semiconductor Processing Chamber
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.