Patent Assignment
Reel/Frame 022291/0205
Assignment of Assignor's Interest
Recorded: 2009-02-20
Pages: 2
Assignors
SCHILLKE, FRANK
Executed: 2009-01-19
FREIMANN, ROLF
Executed: 2009-01-13
DREHER, MATTHIAS
Executed: 2009-01-19
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Apparatus for Determining a Deviation of an Actual Shape from a Desired Shape of an Optical Surface
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.