Patent Assignment
Reel/Frame 022302/0336
Assignment of Assignor's Interest
Recorded: 2009-02-24
Pages: 3
Assignors
BIJNEN, FRANCISCUS GODEFRIDUS CASPER
Executed: 2009-02-12
TENNER, MANFRED GAWEIN
Executed: 2009-02-12
WARNAAR, PATRICK
Executed: 2009-02-16
VAN KEMENADE, MARK
Executed: 2009-02-12
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Alignment Mark and a Method of Aligning a Substrate Comprising Such an Alignment Mark