Assignment of Assignor's Interest

Recorded: 2009-02-24 Pages: 2

Assignor

FELDMANN, HEIKO

Executed: 2009-02-17

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Method and Apparatus for Structuring a Radiation-Sensitive Material

Patent: 8,211,627 →

Application: 12/345,960 →

Publication: US 2009/0191490

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.