Patent Assignment
Reel/Frame 022305/0911
Assignment of Assignor's Interest
Recorded: 2009-02-25
Pages: 4
Assignors
YAMAMOTO, TARO
Executed: 2009-01-29
YOSHITAKA, NAOTO
Executed: 2009-01-29
NISHIKIDO, SHUICHI
Executed: 2009-01-29
TOKUNAGA, YOICHI
Executed: 2009-01-29
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cleaning Apparatus and Cleaning Method, Coater/Developer and Coating and Developing Method, and Computer Readable Storing Medium