Patent Assignment
Reel/Frame 022319/0480
Assignment of Assignor's Interest
Recorded: 2009-02-27
Pages: 3
Assignor
NISHIMURA, EIICHI
Executed: 2009-02-05
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus