Patent Assignment
Reel/Frame 022341/0518
Assignment of Assignor's Interest
Recorded: 2009-02-23
Pages: 4
Assignors
KAMEDA, KENJI
Executed: 2009-02-16
WANG, JIE
Executed: 2009-02-16
URANO, YUJI
Executed: 2009-02-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOAKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method for manufacturing semiconductor device and substrate processing apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.