Patent Assignment
Reel/Frame 022341/0840
Assignment of Assignor's Interest
Recorded: 2009-03-04
Pages: 3
Assignor
SHINDO, TAKEHIRO
Executed: 2008-03-17
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Position Determining Method and Substrate Position Detecting Method