Patent Assignment
Reel/Frame 022358/0591
Assignment of Assignor's Interest
Recorded: 2009-03-05
Pages: 3
Assignors
YANG, MICHAEL X.
Executed: 2002-06-06
ITOH, TOSHIO
Executed: 2002-06-04
XI, MING
Executed: 2002-06-07
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, PATENT COUNSEL, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Plasma-Enhanced Cyclic Layer Deposition Process for Barrier Layers