Patent Assignment
Reel/Frame 022361/0915
Assignment of Assignor's Interest
Recorded: 2009-03-09
Pages: 3
Assignor
ISHIDA, TOSHIFUMI
Executed: 2009-02-27
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cover Part, Process Gas Diffusing and Supplying Unit, and Substrate Processing Apparatus