Patent Assignment
Reel/Frame 022367/0226
Assignment of Assignor's Interest
Recorded: 2009-03-09
Pages: 5
Assignee
AMERICAN AIR LIQUIDE, INC.
46409 LANDING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(2)
Solid Precursor Sublimator
Method and Apparatus to Vaporize Solid Precursors
Application:
61/093,960 →