Patent Assignment
Reel/Frame 022388/0479
Assignment of Assignor's Interest
Recorded: 2009-03-09
Pages: 3
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Xy-Coordinate Compensation Apparatus and Method in Sample Pattern Inspection Apparatus