Patent Assignment
Reel/Frame 022396/0342
Assignment of Assignor's Interest
Recorded: 2009-03-16
Pages: 3
Assignors
YAMAGUCHI, WATARU
Executed: 2009-02-06
MATSUMOTO, TAKAHIRO
Executed: 2009-02-09
INA, HIDEKI
Executed: 2009-02-06
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Surface Shape Measuring Apparatus, Exposure Apparatus, and Device Manufacturing Method