Patent Assignment
Reel/Frame 022398/0301
Assignment of Assignor's Interest
Recorded: 2009-03-16
Pages: 2
Assignor
KATO, SHINICHI
Executed: 2009-03-05
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Method and Apparatus for Processing Semiconductor Wafer After Impurity Implantation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.