Patent Assignment
Reel/Frame 022413/0146
Assignment of Assignor's Interest
Recorded: 2009-03-18
Pages: 5
Assignors
TAKEBAYASHI, HIROSHI
Executed: 2009-03-03
NAKAMURA, TAICHI
Executed: 2009-03-09
FUJII, TOMOYUKI
Executed: 2009-03-03
Assignee
NGK INSULATORS, LTD.
2-56, SUDA-CHO, MIZUHO-KU, NAGOYA-SHI, AICHI-KEN, 467-8530, JAPAN
Covered Property
(1)
Bonding Structure for a Terminal of a Susceptor of a Semiconductor Device Manufacturing Apparatus