Patent Assignment
Reel/Frame 022423/0874
Assignment of Assignor's Interest
Recorded: 2009-03-11
Pages: 3
Assignors
KOBAYASHI, YOICHI
Executed: 2009-03-02
HIROO, YASUMASA
Executed: 2009-03-02
OHASHI, TSUYOSHI
Executed: 2009-03-02
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO 144-8510, JAPAN
Covered Property
(1)
Polishing Apparatus and Polishing Method