Patent Assignment
Reel/Frame 022424/0649
Assignment of Assignor's Interest
Recorded: 2009-03-20
Pages: 3
Assignors
HARADA, YUJI
Executed: 2009-01-14
HATAKEYAMA, JUN
Executed: 2009-01-14
MAEDA, KAZUNORI
Executed: 2009-01-14
KOBAYASHI, TOMOHIRO
Executed: 2009-01-14
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Polymer, Resist Composition, and Patterning Process