Patent Assignment
Reel/Frame 022441/0802
Assignment of Assignor's Interest
Recorded: 2009-03-24
Pages: 2
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA, 211-8668, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus
Application:
12/409,855 →
Publication:
US 2009/0236316
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.