Patent Assignment
Reel/Frame 022442/0089
Assignment of Assignor's Interest
Recorded: 2009-03-24
Pages: 3
Assignors
KOHNO, MASAYUKI
Executed: 2009-02-20
NISHITA, TATSUO
Executed: 2009-02-20
NAKANISHI, TOSHIO
Executed: 2009-02-20
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Cleaning Method and Plasma Cvd Method