Assignment of Assignor's Interest

Recorded: 2009-03-25 Pages: 2

Assignors

KALLER, JULIAN

Executed: 2009-03-23

GRUNER, TORALF

Executed: 2009-03-19

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Projection Exposure Method and Projection Exposure System Therefor

Patent: 8,248,578 →

Application: 12/410,640 →

Publication: US 2009/0237636

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.