Patent Assignment
Reel/Frame 022457/0626
Assignment of Assignor's Interest
Recorded: 2009-03-26
Pages: 7
Assignors
BUTLER, HANS
Executed: 2009-01-28
VAN DER WIJST, MARC WILHELMUS MARIA
Executed: 2009-03-20
DE PEE, JOOST
Executed: 2009-01-28
DE HOON, CORNELIUS ADRIANUS LAMBERTUS
Executed: 2009-02-26
BOSCHKER, STIJN
Executed: 2009-01-27
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Combination of Structure and an Active Damping System, and a Lithographic Apparatus