Patent Assignment
Reel/Frame 022457/0682
Assignment of Assignor's Interest
Recorded: 2009-03-26
Pages: 4
Assignors
WANG, JO FEI
Executed: 2009-03-24
WU, SUNNY
Executed: 2009-03-24
MOU, JONG-I
Executed: 2009-03-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
E-Chuck for Automated Clamped Force Adjustment and Calibration