Assignment of Assignor's Interest

Recorded: 2009-03-30 Pages: 3

Assignors

MATSUURA, HIROYUKI

Executed: 2008-03-27

NAKAO, KEN

Executed: 2008-04-09

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Substrate Processing Method

Patent: 7,807,587 →

Application: 12/083,342 →

Publication: US 2009/0305512