Patent Assignment
Reel/Frame 022471/0974
Assignment of Assignor's Interest
Recorded: 2009-03-24
Pages: 3
Assignors
MCMILLIN, BRIAN
Executed: 2009-03-19
TONG, JOSE V.
Executed: 2009-03-18
WANG, YEN-KUN VICTOR
Executed: 2009-03-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for Reduction of Voltage Potential Spike During Dechucking