Patent Assignment
Reel/Frame 022486/0680
Assignment of Assignor's Interest
Recorded: 2009-04-01
Pages: 4
Assignor
NAKAGAWA, YOSHIHIKO
Executed: 2009-03-17
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.