Patent Assignment
Reel/Frame 022504/0472
Assignment of Assignor's Interest
Recorded: 2009-04-03
Pages: 6
Assignors
DUSSARRAT, CHRISTIAN
Executed: 2009-03-30
BLASCO, NICOLAS
Executed: 2009-03-12
PINCHART, AUDREY
Executed: 2009-03-18
LACHAUD, CHRISTOPHE
Executed: 2009-03-18
Assignee
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
75, QUAI D'ORSAY, PARIS, F-75007, FRANCE
Covered Property
(1)
Method of Forming Dielectric Films, New Precursors and Their Use in Semiconductor Manufacturing