Patent Assignment
Reel/Frame 022506/0452
Assignment of Assignor's Interest
Recorded: 2009-04-06
Pages: 2
Assignor
EPPLE, ALEXANDER
Executed: 2009-03-25
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Catadioptric Projection Objective with Pupil Mirror, Projection Exposure Apparatus and Projection Exposure Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.