Patent Assignment
Reel/Frame 022511/0707
Assignment of Assignor's Interest
Recorded: 2009-04-06
Pages: 4
Assignors
CHEBI, ROBERT
Executed: 2009-03-17
LIN, FRANK
Executed: 2009-03-19
WINNICZEK, JAROSLAW W.
Executed: 2009-03-03
CHEN, WAN-LIN
Executed: 2009-03-04
MCDONNELL, ERIN
Executed: 2009-03-04
ZHENG, LILY
Executed: 2009-03-17
LASSIG, STEPHAN
Executed: 2009-03-13
BOGART, JEFF
Executed: 2009-03-16
RUSU, CAMELIA
Executed: 2009-03-13
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Fabrication of a Silicon Structure and Deep Silicon Etch with Profile Control