Patent Assignment
Reel/Frame 022514/0910
Assignment of Assignor's Interest
Recorded: 2009-04-07
Pages: 5
Assignors
SUN, SAM X.
Executed: 2009-03-31
XU, HAO
Executed: 2009-03-31
FLAIM, TONY D.
Executed: 2009-03-31
Assignee
BREWER SCIENCE INC.
2401 BREWER DRIVE, ROLLA, MISSOURI, 65401
Covered Property
(1)
On-Track Process for Patterning Hardmask by Multiple Dark Field Exposures