Patent Assignment
Reel/Frame 022521/0381
Assignment of Assignor's Interest
Recorded: 2009-04-08
Pages: 3
Assignor
YOSHITAKE, SHUSUKE
Executed: 2009-04-03
Assignee
NUFLARE TECHNOLOGY, INC.
2068-3, OOKA, NUMAZU-SHI, SHIZUOKA, 410-8510, JAPAN
Covered Property
(1)
Electron Beam Writing Apparatus and Position Displacement Amount Correcting Method