Patent Assignment
Reel/Frame 022555/0298
Assignment of Assignor's Interest
Recorded: 2009-04-16
Pages: 3
Assignors
YAMAMOTO, YASUHITO
Executed: 2009-02-20
SUZUKI, MASARU
Executed: 2009-02-20
HAGIHARA, JUNICHI
Executed: 2009-02-20
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Probe Apparatus, Probing Method, and Storage Medium