Patent Assignment
Reel/Frame 022580/0056
Assignment of Assignor's Interest
Recorded: 2009-04-22
Pages: 4
Assignors
HASEBE, KAZUHIDE
Executed: 2009-01-26
NAKAJIMA, SHIGERU
Executed: 2009-01-26
OGAWA, JUN
Executed: 2009-01-26
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Formation Method and Apparatus for Forming Silicon-Containing Insulating Film